Modular design, seamless upgrade, up to 12 inch wafer.
Quick and fine-tuning lift function for chuck stage.
Capable for Wafer test, PCB/IC test, RF test, high voltage and current test.
CH-8 | 8~12" large-sized comprehensive probe station
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Features/Applications
◆ Up to 12 inch wafer
◆ High precise screw drive structure, linear movement
◆ Compatible with multiple types of microscope
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Specifications
Chuck stage
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Model |
CH-8/CH-12 |
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Chuck size |
8"/12" |
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Rotation range |
360°with angle locking, fine-tuning for 15° with 0.1° resolution |
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X-Y travel range |
8"*8"/12"*12" |
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X-Y travel resolution |
10μm/1μm |
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Sample mounting mode |
Vacuum |
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Chuck capacity |
U shape, up to 10 micropositioners |
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Stage lift ability |
6mm-quick lift. 25mm fine-tuning |
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Electrical design |
Electrical floating on chuck back, can be used as gate electrode |
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Dimension |
840(L)*600(W)*700mmH/950(L)*700(W)*700mm(H) |
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Weight |
100KG/150KG |
Optical system
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Microscope |
Single tube microscope /stereo microscope / metalloscope |
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Magnification |
16X-200X/20X-4000X |
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Travel range |
X-Y up to 2"*2", vertical to 50.8mm |
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Camera |
CCD Camera |
Micropositioner
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X-Y-Z travel range |
12mm-12mm-12mm |
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Resolution |
10μm/2μm/0.7μm/0.5μm |
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Mounting mode |
Magnetic/vacuum |
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Cable |
Coaxial / triaxial |
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Leakage current |
10pA/100fA/10fA upon request |
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Cable connector |
Banana head /Crocodile clip /Coaxial /Triaxial |
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Probe tip diameter |
0.5μm/1μm/2μm/5μm/10μm/20μm upon request |
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Probe metal |
Tungsten/Beryllium copper upon request |
Optional Accessories
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Hot chuck |
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Display screen |
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Laser system |
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RF test accessoriess |
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Shield box |
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Probe card holder |
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Optical platform |
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Gold-plated chuck |
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High voltage test accessories |
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All Rights Reserved. Shenzhen Cindbest Technology Co., Ltd |
Shenzhen Cindbest Technology Co., Ltd
Add: 8F Weihuada Industrial Park No.5 Lirong Rd Xinshi Com Dalang St Longhua Dist Shenzhen,China
Tel: 0755-29412885 E-mail: aldrich@cindbest.com; francowang@cindbest.com |
