How the manual probe station works
2018-06-057603
How the manual probe station works
Manual probe station use:
The main purpose of the manual probe station is to provide a test platform for the electrical parameter testing of semiconductor chips. The probe station can absorb a variety of chip specifications, and provides multiple adjustable test pins and probe holders, which can be used to complete integrated circuits with measuring instruments. Parameters such as voltage, current, resistance and capacitor voltage characteristic curve. It is suitable for scientific research analysis, spot check and other purposes of chip.
How to use the manual probe station:
1. Load the sample into the vacuum chuck and turn on the vacuum valve control switch to make the sample securely and firmly adsorbed on the chuck.
2. Use the chuck X-axis / Y-axis control knob to move the chuck platform, and see the sample clearly under the microscope's low magnification objective lens.
3. Use the chuck X-axis / Y-axis control knob to move the chuck platform to move the sample to be tested to the microscope.
4. Switch the microscope to a high magnification objective, find the point to be measured at a large magnification, and then fine-tune the microscope focus and sample x-y to adjust the image clearly with the measurement point at the center of the microscope's field of view.
5.After confirming the position of the point to be measured, adjust the position of the probe base. After installing the probe, you can move the probe to the position close to the point to be measured, and then use the three fine adjustments of the probe base XYZ. Knob, slowly move the probe to the measured point. At this time, be careful and slow to prevent the chip from being damaged by excessive movement. When the probe tip is suspended above the measured point, use the Y-axis knob to move the probe first. Move the needle back a little, then use the Z-axis knob to lower the needle, and finally use the X-axis knob to slide left and right to observe if there are any scratches to prove whether they have touched.
6. After ensuring that the needle tip is in good contact with the measured point, you can start the test with the connected test equipment.
Manual probe station
Troubleshooting common manual probe stations
When you use this instrument, you may encounter some problems. The following table lists common faults and solutions.
symptom
possible reason
Solution
The picture becomes blurred after moving the sample
Microscope is not vertical
Vertical microscope
The sample stage is not level
Leveling sample stage
Sample is uneven
Insufficient microscope field of view, edge cut or no image
Converter is not in position
Turn the converter to the position
Tubescope turntable is not in position
Turn the tubescope dial to the position
Insufficient lighting
Adjust the brightness of the light source or increase the aperture
Without eyepiece
Attach eyepiece
No objective lens
Attach the objective lens
Deterioration of microscope image
Eyepiece dirty
Objective lens is dirty
Tubescope dirty
Clean the eyepiece, objective lens and tube lens
The aperture light bar is too large or too small
Adjust aperture light bar
Not in focus
Adjust focus handwheel
Cover the sample with coverslips and other media
Remove coverslips and other media
The image is sharp and blurred
Samples are placed at an angle
Level the sample or level the sample stage
Objective lens is not tightened
Screw-on objective
Eye fatigue easily
Interpupillary distance between binocular head and operator
Adjusting the interpupillary distance of the binocular head
Eyepiece vision adjustment is incorrect
Adjust eyepiece visibility
Illumination brightness is inappropriate
Adjust light source brightness or aperture
Manual probe station maintenance and service
1. Avoid collisions: Avoid collisions during installation and operation of the CS probe station. The body should be placed flat, not tilted or sideways, to avoid machine failure or abnormal noise.
2. Transport of the instrument: When transporting the instrument, please unplug the power cord first.
The instrument should be transported in a special packing box to avoid touching any moving parts of the probe station.
3. Storage of the instrument
After use, please pay attention to keep clean, and try to blow the dust as much as possible, so as not to contaminate the mechanical precision parts, optical parts, and electrical contact surfaces, which will cause the accuracy of the instrument to decrease.
When cleaning the body of the probe station, avoid direct splashing to clean it. Wipe gently with a dust-free cloth and blow dry. Do not touch the machine with hard objects to avoid malfunction or danger.
When cleaning the optical parts of the probe station, you can use lens paper dipped in absolute alcohol to gently wipe it from the center to the outside. It is flammable when anhydrous alcohol, please pay attention to safety.
Unplug the power cord to protect the life of the machine during power outages or when not in use for a long time.
The operator must operate strictly according to the requirements to ensure the accuracy of the data and the normal use of the instrument.
4. Working environment
The probe station should be placed on a stable and reliable surface, preferably on a workbench with anti-vibration device, to avoid use in high temperature, humid and intense vibration, direct sunlight and dusty environments.
The optimal temperature range is 5 ℃ ～ 40 ℃, the optimal humidity is 40% to 85%, if the humidity in the air is less than 30%, the reliable humidity controller will control it to maintain the range of 50% to 60%. Doors and windows should be closed as much as possible during use to achieve a dehumidifying effect indoors.
Power supply: 220 ± 10%, 50 ~ 60Hz
Manual probe station
